FAQ_Manual Stage_Terms / definition (accuracy, unit, etc.)

Terms / definition (accuracy, unit, etc.)

Direction of pitching, yawing, & rolling: What do "pitching, yawing, rolling (pitch, yaw, roll)" mean?; ◆ Pitching: Rotating movement around the axis perpendicular (left and right) to the traveling direction
    (front and back)
    → Inclination of up and down

◆ Yawing: Rotating movement around the axis perpendicular (up and down) to the traveling direction
    (front and back)
    → Inclination of left and right

◆ Rolling: Rotating movement around the axis of travelling direction(forward and backward)

Difference between straightness, pitching and yawing

Please tell me the difference between straightness, pitching and yawing

◆ Straightness [unit: μm]
・ Maximum displacement amount (distance) in the horizontal and vertical directions with respect
to the ideal movement axis.

◆ Pitching [unit: ″]
・ Maximum displacement angle in the vertical swing direction.

◆ Yawing [unit: ″]
・ Maximum displacement angle in the horizontal swing direction.

Horizontal Z-axis / difference in straightness and verticality of movement: [Horizontal plane Z axis] Please tell me the difference between straightness and verticality of motion; ◆ Straightness of movement [unit: μm]
・ Maximum displacement amount (distance) in the horizontal and vertical directions with respect
to the ideal movement axis.

◆ Verticality of movement [unit: μm]
・ Fix the horizontal plane Z axis stage and right angle reference on reference plane.
・ Measure the displacement between the right angle reference and the measuring equipment
set on the top of the stage.
・ The maximum difference among the values shall be the "Perpendicularity".

Difference between eccentricity and runout of rotary stage: [Rotary stage] Please tell me the difference between eccentricity and runout; ◆ Eccentricity [unit: μm]
・ Displacement of center axis of rotation in horizontal direction

◆ Runout [unit: μm]
・ Maximum difference of displacement with respect to the reference plane when making one rotation
with outer circumference as measurement point

Difference between parallelism and motion parallelism

Please tell me the difference between parallelism and motion parallelism

◆ Parallelism [unit: μm]
· Fix the stage on the reference plane.
· A numerical value indicating how parallel the stage carriage and the reference plane are.

◆ Motion parallelism [unit: μm]
・ Fix the stage on the reference plane.
・ Place equipment for measuring the height with the reference plane on the stage carriage.
・ Maximum difference of measured values by moving the stage.

Difference between allowable moment load and moment rigidity: Please tell me the difference between allowable moment load and moment rigidity; ◆ Allowable moment load [unit: N · m] (manual stage)
It is a numerical value that specifies how far the load can be applied away from the stage surface.
* Criteria within tolerance
1. The feeling of operation is not significantly impaired
2. Accuracy after disconnecting the load can fit within the catalog guaranteed values

◆ Moment rigidity [Unit: "/ N · cm]
・ The displacement angle per 1 N · cm when moment load is applied toward the stage carriage
in the direction of the respective pitch, yaw & roll
* Based on the distance from the center of the stage carriage (upper surface)
* The moment rigidity value in the catalog is described as a representative actual measurement value.

What is reverse type (R type): What is the direction of reverse type (R type)?; It is the direction which reflected the manual stage in the mirror.
In the side push type, the operating position (micrometer / feed screw) and the position of the clamp
are switched.
In the center push type, only the clamp is on the opposite side of the stage carriage.